2023-2024 / PHYS3037-1

Nanofabrication : principles and techniques


25h Th, 15h Pr

Number of credits

 Master of Science (MSc) in Engineering Physics5 crédits 
 Master in physics, research focus (FAME+)4 crédits 
 Master in chemistry (120 ECTS) (AMIS)4 crédits 
 Master in chemistry (120 ECTS) (FAME AIS)4 crédits 
 Master in physics (120 ECTS)4 crédits 
 Master in physics (120 ECTS) (AMIS)4 crédits 
 Master in physics (120 ECTS) (FAME-AIS)4 crédits 
 Master in physics (60 ECTS) (Registrations are closed)4 crédits 
 Advanced Master in Nanotechnologies4 crédits 


Ngoc Duy Nguyen, Alejandro Silhanek

Language(s) of instruction

English language

Organisation and examination

Teaching in the second semester


Schedule online

Units courses prerequisite and corequisite

Prerequisite or corequisite units are presented within each program

Learning unit contents

This course is an introduction to the principles and techniques of nanofabrication. It consists of two parts, detailed as follows:

PART I - Nanolithography

1. Photolithography

2. Electron beam lithography

3. Focused ion beam - dual beam

4. Other nanofabrication techniques

PART II - Material synthesis at the nanoscale

1. Surface adsorption and growth mechanisms

2. Physical vapour deposition

3. Chemical vapour deposition

4. Etching processes

Learning outcomes of the learning unit

As result of this teaching, students will acquire the following competences and skills:

* To integrate processes of micro- and nanoscale device fabrication in view of realizing particular devices,

* To make use of nanofabrication design tools,

* To perform micro- and nanofabrication process steps in a clean room environment,

* To characterize the micro- and nanosystems at the different steps using the tools available at the NanoFab platform of ULiège.

Prerequisite knowledge and skills

Basic concepts in solid-state materials physics and/or chemistry are necessary. Bachelor-degree experience in laboratory works is necessary. A noticeable inclination for cooking at home is an asset.

Planned learning activities and teaching methods

Theoretical concepts related to the processes involved in nanofabrication will be exposed during oral lectures following the table of contents described above. Practical laboratory work will be performed as direct applications to these concepts and will be organized following the scheme described below,

Lab-1 (2h): SEM visualization

Lab-2 (2h): ELPHY/KLayout/Ledit Pattern generator

Lab-3 (3h): Spin coating + backing + dose test + development + analysis

Lab-4 (2h): Material synthesis by rf magnetron sputtering

Lab-5 (2h): Metallization by electron beam evaporation and lift-off

Lab-6 (4h): Characterization and analysis (surface morphology, device topography, electrical transport and magnetic properties)

The acquired competencies and skills will be applied to the design and fabrication of a particular device. This project will be performed in groups with the support of bibliographical resources and with the assistance of the tutors.

Mode of delivery (face to face, distance learning, hybrid learning)

Face-to-face course

Additional information:

Lectures on theoretical concepts will be given by the tutors face-to-face. Practical works will be performed by the students in the laboratories with the guidance of lab assistants and tutors.

The choice of the teaching mode will also depend on the number of students registered to the course. When possible, the course could thus be organized via the inverted classroom approach, instead of the traditional ex cathedra mode.

Recommended or required readings

List of useful references :
* Nanofabrication - Techniques and Principles, M. Stepanova and S. Dew, Editors, Springer 2012 (ISBN 978-3-7091-0423-1 e-ISBN 978-3-7091-0424-8 DOI 10.1007/978-3-7091-0424-8)
* The Materials Science of Thin Films, M. Ohring, Academic Press 1992, ISBN0-12-524990-X

Exam(s) in session

Any session

- In-person

oral exam

Written work / report

Additional information:

Exam(s) in session

Any session

- In-person

oral exam

Written work / report

Additional information:

The evaluation will consist, on one hand, of a final report of three pages, which follows the style of a scientific publication, taking into account the assessment by lab assistants and teachers regarding the work of the students over the semester, and, on the other hand, of an oral presentation of the lab project.

Work placement(s)


Organisational remarks and main changes to the course

Course material and resources are available on eCampus.



Alejandro V. SILHANEK, Professor

Ngoc Duy NGUYEN, Professor


Association of one or more MOOCs