Duration
25h Th, 15h Pr
Number of credits
Lecturer
Coordinator
Language(s) of instruction
English language
Organisation and examination
Teaching in the second semester
Units courses prerequisite and corequisite
Prerequisite or corequisite units are presented within each program
Learning unit contents
This course is an introduction to the principles and techniques of nanofabrication. It consists of two parts, detailed as follows:
PART I - Nanolithography
1. Photolithography
2. Electron beam lithography
3. Focused ion beam - dual beam
4. Other techniques
PART II - Material synthesis at the nanoscale
1. Surface adsorption and growth mechanisms
2. Physical vapour deposition
3. Chemical vapour deposition
4. Etching processes
Learning outcomes of the learning unit
As result of this teaching, students will acquire the following competences and skills:
* To integrate processes of micro- and nanoscale device fabrication in view of realizing particular devices,
* To make use of nanofabrication design tools,
* To perform micro- and nanofabrication process steps in a clean room environment,
* To characterize the micro- and nanosystems at the different steps using the tools available at the NanoFab platform of ULiège.
Prerequisite knowledge and skills
Basic concepts in solid-state materials physics and/or chemistry are necessary. Bachelor-degree experience in laboratory works is necessary. A noticeable inclination for cooking at home is an asset.
Planned learning activities and teaching methods
Theoretical concepts related to the processes involved in nanofabrication will be exposed during oral lectures following the table of contents described above. Practical laboratory work will be performed as direct applications to these concepts and will be organized following the scheme described below,
Lab-1 (2h): SEM visualization
Lab-2 (2h): ELPHY/KLayout/Ledit Pattern generator
Lab-3 (3h): Spin coating + backing + dose test + development + analysis
Lab-4 (2h): Material synthesis by rf magnetron sputtering
Lab-5 (2h): Metallization by electron beam evaporation and lift-off
Lab-6 (4h): Characterization and analysis (surface morphology, device topography, electrical transport and magnetic properties)
The acquired competencies and skills will be applied to the design and fabrication of a particular device. This project will be performed in groups with the support of bibliographical resources and with the assistance of the tutors.
Mode of delivery (face-to-face ; distance-learning)
Lectures on theoretical concepts will be given by the tutors face-to-face. Practical works will be performed by the students in the laboratories with the guidance of lab assistants and tutors.
Recommended or required readings
List of useful references :
* Nanofabrication - Techniques and Principles, M. Stepanova and S. Dew, Editors, Springer 2012 (ISBN 978-3-7091-0423-1 e-ISBN 978-3-7091-0424-8 DOI 10.1007/978-3-7091-0424-8)
* The Materials Science of Thin Films, M. Ohring, Academic Press 1992, ISBN0-12-524990-X
Assessment methods and criteria
The first part of the evaluation will consist of a written exam that will be organized at the end of the semester. The second part of the evaluation will consist of the assessment of the final laboratory report, which will partially be weighted by an input from the lab assistants on the work of the students over the semester.
Work placement(s)
None.
Organizational remarks
Course material and resources are available on eCampus.
Contacts
Tutors:
Prof. A. V. Silhanek (asilhanek@ulg.ac.be)
Prof N. D. Nguyen (ngocduy.nguyen@ulg.ac.be)