Study Programmes 2015-2016
ELEN0038-1  
Microsystems
Duration :
30h Th, 5h Pr, 20h Labo., 40h Proj.
Number of credits :
Master in biomedical engineering (120 ECTS)5
Master in biomedical engineering (120 ECTS)5
Master in electrical engineering (120 ECTS)5
Master in computer science and engineering (120 ECTS)5
Master in computer science and engineering (120 ECTS)5
Master in physical engineering (120 ECTS)5
Master in physical engineering (120 ECTS)5
Specialised master in nanotechnology5
Lecturer :
Michael Kraft
Language(s) of instruction :
English language
Organisation and examination :
Teaching in the second semester
Units courses prerequisite and corequisite :
Prerequisite or corequisite units are presented within each program
Course contents :
This course is an introduction to microtechnology and microsystems. The material covers microfabrication, MEMS sensors and actuators, lumped element models, heat transfer management, microfluidics and biosensors. 
Learning outcomes of the course :
At the end of this course, the student will have a good overview of microtechnology and physical constraints at the microscale.  Microsystem design is learned through a series of lectures/tutorials and practiced in a group project. The student will also develop further his/her ability to perform experimental work during the lab sessions. These latter will give him/her a practical view of the challenges encountered in microfabrication.
Both the assignment and the lab sessions involve theoretical background from many different fields. They will therefore be worked out in small groups (4-5 students). The students will be mixed according to their background; hence they will benefit from the knowledge of the others.
In the course project, the student will learn about a cutting-edge topic. He/she will improve his/her presentation skills (incl. selection of relevant information, slides, spoken english) and his/her critical thinking.
Special attention is given to both written and spoken English. All the assignments will be submitted in English. Feedback will be regularly provided.
Prerequisite knowledge and skills :
basic electronics and physics.
Planned learning activities and teaching methods :
The course comprises:
  • about 12 lectures (2h each), in which theory and applications are covered.
  • about 6 tutorials (2h each) and an assignment. DESCRIPTION TUTORIALS. In the assignment, students work together on the design of a microsystem.
  • 1 lab session (4h - group work). In the first session, the students will micropattern and functionalize a surface with different microfabrication techniques. In the second session, they will characterize various physical properties of these surfaces. Results from different groups will be discussed and compared.
  • 3 course project sessions (1 practice + 2 final - 2h each - individual work). On the first day of class, every student chooses a scientific publication in a list. This article describes a "cutting-edge" technology. The student is asked to present this research in 5', and in English. He/she is also asked to discuss those results and propose perspectives. During the practice sessions, individual feedback will be given on the presentation skills.
Mode of delivery (face-to-face ; distance-learning) :
Face-to-face lectures, Wed afternoon
Recommended or required readings :
Slides,
"Microsystems design", S.D. Senturia, K.A.P. 2001.
"An Introduction to Microelectromechanical Systems Engineering", 2nd Edition, N. Maluf, K. Williams, 2004
Assessment methods and criteria :
Oral Exam (35%)
Assignment (30%)
Lab report (!5%)
Presentation (20%)
 
Work placement(s) :
Organizational remarks :
Contacts :
M. Kraft
Tél: 04 366 2616 m.kraft@ulg.ac.be