University of Liege | Version française
Academic year 2014-2015Value date : 12/05/2015
Version 2013-2014
ELEN0038-1  Integrated electronics of microsystems

Duration :  30h Th, 30h Pr
Number of credits :  
Master in Biomedical Engineering, research focus, 2nd year5
Master in Biomedical Engineering, research focus, 2nd year5
Master in Electrical Engineering, research focus, 1st year5
Master in Electrical Engineering, research focus, 2nd year5
Master of science in computer science and engineering, research focus, 2nd year5
Master in Engineering Physics, research focus, 2nd year5
Master in in Electrical Engineering, professional focus in sustainable car technologies, 1st year5
Master in Electrical Engineering, specialized approach, 1st year5
Advanced Master in Nanotechnology5
Lecturer :  Michael Kraft
Language(s) of instruction :  
English language
Course contents :  
Microfabrication technology, microsystem modelling, physical MEMS sensors, MEMS actuators, RF MEMS, packaging, industrial and biomedical case studies.
Learning outcomes of the course :  
At the end of the course, the student will master the fundamentals of design and modeling of integrated microsystems, in a multidisciplinary approach, from sensors to actuators and information processing.
Prerequisites and co-requisites/ Recommended optional programme components :  
basic electronics and physics.
Planned learning activities and teaching methods :  
case studies and talks by industrial collaborators.
Mode of delivery (face-to-face ; distance-learning) :  
Face-to-face lectures on Tuesday PM of Spring term.
Recommended or required readings :  
Slides,
"Microsystems design", S.D. Senturia, K.A.P. 2001.
"An Introduction to Microelectromechanical Systems Engineering", 2nd Edition, N. Maluf, K. Williams, 2004
Assessment methods and criteria :  
personal work, microsystem pre-design .
Work placement(s) :  
Organizational remarks :  
Contacts :  
M. Kraft
Tél: 04 366 2616 m.kraft@ulg.ac.be



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